Open AccessTopas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography
Author(s) -
Brian Bilenberg,
Mikkel Fougt Hansen,
D. M. Johansen,
Veysel Özkapici,
Claus Jeppesen,
Péter Szabó,
I. Obieta,
O. Arroyo,
Jonas O. Tegenfeldt,
Anders Kristensen
Publication year - 2005
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.2091089
Subject(s) - nanoimprint lithography , fabrication , materials science , lithography , microsystem , nanotechnology , microfabrication , optoelectronics , medicine , alternative medicine , pathology
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