Open AccessComparison of the agglomeration behavior of thin metallic films on SiO2
Author(s) -
Parag Gadkari,
Andrew P. Warren,
R Todi,
Rumyana Petrova,
Kevin R. Coffey
Publication year - 2005
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.1861943
Subject(s) - icon , citation , download , information retrieval , computer science , search engine optimization , world wide web , search engine , programming language
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