High-temperature gas sensor using perovskite thin films on a suspended microheater | Zendy

O M Grudin | Zendy; R. Marinescu | Zendy; L. M. Landsberger | Zendy; M. Kahrizi | Zendy; G. Frolov | Zendy; J.D.N. Cheeke | Zendy; S. Chehab | Zendy; Mark Post | Zendy; James J. Tunney | Zendy; Xiaowei Du | Zendy; Dongfang Yang | Zendy; Don Segall | Zendy

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High-temperature gas sensor using perovskite thin films on a suspended microheater

Author(s) -

O M Grudin,

R. Marinescu,

L. M. Landsberger,

M. Kahrizi,

G. Frolov,

J.D.N. Cheeke,

S. Chehab,

Mark Post,

James J. Tunney,

Xiaowei Du,

Dongfang Yang,

Don Segall

Publication year - 2002

Publication title -

journal of vacuum science and technology a vacuum surfaces and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/1.1463072

Subject(s) - microheater , materials science , thin film , chemiresistor , oxide , perovskite (structure) , optoelectronics , analytical chemistry (journal) , electronic nose , chemical vapor deposition , nanotechnology , chemical engineering , fabrication , chemistry , chromatography , engineering , medicine , alternative medicine , pathology , metallurgy

Peer reviewed: YesNRC publication: Ye

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