Open AccessControl of the radio-frequency wave form at the chuck of an industrial oxide-etch reactor
Author(s) -
L.A. Berry,
Helen Maynard,
Paul Miller,
T. Moore,
Michael Pendley,
Victoria Resta,
D. O. Sparks,
Qingyun Yang
Publication year - 2000
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.1319819
Subject(s) - microelectronics , radio frequency , materials science , fabrication , ion , energy (signal processing) , power (physics) , optoelectronics , electronic circuit , electrical engineering , computer science , acoustics , nuclear engineering , physics , engineering , medicine , alternative medicine , pathology , quantum mechanics
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