Open AccessScanning probe metrology in the presence of surface charge
Author(s) -
J. E. Griffith,
E. Kneedler,
Sean Ningen,
A Berghaus,
C. E. Bryson,
Stanley Pau,
Eric C. Houge,
T. L. Shofner
Publication year - 2000
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.1313586
Subject(s) - stylus , scanning probe microscopy , charge coupled device , optics , materials science , metrology , surface (topology) , surface metrology , microscope , scanning electron microscope , surface charge , nanotechnology , optoelectronics , surface finish , chemistry , acoustics , physics , profilometer , composite material , geometry , mathematics
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