Open AccessFabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner
Author(s) -
J. R. Wendt,
T. Krygowski,
G.A. Vawter,
O. Blum,
William C. Sweatt,
Mial E. Warren,
David Reyes
Publication year - 2000
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.1313580
Subject(s) - microlens , microelectromechanical systems , materials science , microfabrication , scanner , optics , fabrication , laser , lithography , optoelectronics , etching (microfabrication) , electron beam lithography , laser scanning , resist , lens (geology) , nanotechnology , physics , medicine , alternative medicine , pathology , layer (electronics)
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