Open AccessSputtering and Evaporating of High Density (111)-textured Ag Nanotwinned Films on Sapphire Wafers
Author(s) -
Yin-Hsuan Chen,
Pei-Ing Lee,
TungHan Chuang
Publication year - 2022
Publication title -
proceedings of the world congress on mechanical, chemical, and material engineering
Language(s) - English
Resource type - Conference proceedings
ISSN - 2369-8136
DOI - 10.11159/mmme22.120
Subject(s) - sputtering , wafer , sapphire , materials science , optoelectronics , thin film , nanotechnology , optics , laser , physics