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Casimir Forces in MEMS/NEMS: Influence of Nanoscale Surface Roughness and Material Optical Properties
Author(s) -
G. Palasantzas,
V. B. Svetovoy
Publication year - 2017
Publication title -
proceedings of the world congress on recent advances in nanotechnology
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.104
H-Index - 2
ISSN - 2371-5308
DOI - 10.11159/icnnfc17.1
Subject(s) - nanoelectromechanical systems , casimir effect , nanoscopic scale , microelectromechanical systems , materials science , surface roughness , surface finish , nanomechanics , nanophotonics , optoelectronics , nanotechnology , atomic force microscopy , composite material , classical mechanics , physics , nanoparticle , nanomedicine

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