Open AccessNumerical Modeling of Surface Roughness Effects on the Natural Frequency of a Silicon Cantilever
Author(s) -
Jean Marriz Manzano,
Magdaleno R. Vasquez,
Marc Rosales,
Maria Theresa de Leon
Publication year - 2020
Publication title -
proceedings of the international conference of energy harvesting, storage, and transfer
Language(s) - English
Resource type - Conference proceedings
ISSN - 2561-1097
DOI - 10.11159/ehst20.109
Subject(s) - cantilever , silicon , surface roughness , materials science , natural frequency , surface finish , natural (archaeology) , surface (topology) , composite material , acoustics , optoelectronics , geology , physics , geometry , mathematics , vibration , paleontology