
Integration and Control of a MEMS Optical Phased Array Scanner
Author(s) -
Tarek Mohammad,
Siyuan He,
Ridha Mrad
Publication year - 2021
Publication title -
proceedings of the international conference of control, dynamic systems, and robotics
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.126
H-Index - 5
ISSN - 2368-5433
DOI - 10.11159/cdsr21.304
Subject(s) - scanner , microelectromechanical systems , phased array , phased array optics , computer science , integrated optics , engineering , materials science , optoelectronics , telecommunications , artificial intelligence , antenna (radio)