Open AccessDesign of a Silicon Micromachined Artifact for Hybrid Dimensional Measurement
Author(s) -
Andrew Oliver,
Hy D. Tran,
Andre Aman Claudet
Publication year - 2006
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1115/msec2006-21095
Subject(s) - metrology , artifact (error) , calibration , surface micromachining , realization (probability) , computer science , coordinate measuring machine , mesoscale meteorology , silicon , computer vision , engineering , materials science , mechanical engineering , optics , optoelectronics , medicine , statistics , physics , alternative medicine , mathematics , pathology , climatology , fabrication , geology
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