Open AccessThermal Conductivity Measurements on Polysilicon Microbridges Using the 3-Omega Technique
Author(s) -
Patrick E. Hopkins,
Leslie M. Phinney
Publication year - 2008
Publication title -
asme 2008 first international conference on micro/nanoscale heat transfer, parts a and b
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1115/mnht2008-52293
Subject(s) - materials science , thermal conductivity , microelectromechanical systems , polycrystalline silicon , surface micromachining , thermal , silicon , joule heating , transient (computer programming) , thermal resistance , composite material , optoelectronics , layer (electronics) , thermodynamics , fabrication , medicine , alternative medicine , physics , pathology , computer science , operating system , thin film transistor
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