Open AccessComputational Analysis of Responses of Micro Electro-Thermal Actuators
Author(s) -
C. Channy Wong,
Leslie M. Phinney
Publication year - 2007
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1115/imece2007-41462
Subject(s) - actuator , silicon , thermal , bent molecular geometry , mechanical engineering , heat sink , materials science , beam (structure) , surface micromachining , thermal analysis , heat flux , jump , mechanics , optoelectronics , optics , heat transfer , physics , electrical engineering , engineering , fabrication , composite material , medicine , alternative medicine , pathology , quantum mechanics , meteorology
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