Open AccessVan der Waals and Capillary Adhesion of Microelectromechanical Systems
Author(s) -
Frank W. DelRio,
Maarten P. Boer,
Leslie M. Phinney,
Chris J. Bourdon,
Martin L. Dunn
Publication year - 2006
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1115/imece2006-15169
Subject(s) - van der waals force , adhesion , capillary action , capillary condensation , london dispersion force , surface finish , surface roughness , meniscus , materials science , surface energy , condensation , nanotechnology , composite material , chemical physics , chemistry , thermodynamics , optics , adsorption , physics , molecule , organic chemistry , incidence (geometry)
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