Open AccessOptical Testing of Polycrystalline Silicon Flexure-Type Optical Actuators
Author(s) -
Justin R. Serrano,
Leslie M. Phinney
Publication year - 2006
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.1115/imece2006-14950
Subject(s) - materials science , actuator , microelectromechanical systems , irradiation , polycrystalline silicon , microactuator , photothermal effect , optoelectronics , optics , displacement (psychology) , laser , composite material , photothermal therapy , layer (electronics) , electrical engineering , nanotechnology , engineering , psychology , physics , nuclear physics , psychotherapist , thin film transistor
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