Open AccessMEMS Lubrication by Tribochemical Reaction
Author(s) -
Michael T. Dugger,
David B. Asay,
James Anthony Ohlhausen,
Seong H. Kim
Publication year - 2007
Publication title -
asme/stle 2007 international joint tribology conference, parts a and b
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.1115/ijtc2007-44308
Subject(s) - lubrication , rubbing , materials science , silicon , monolayer , alcohol , nitrogen , vapor pressure , water vapor , microelectromechanical systems , composite material , chemistry , nanotechnology , metallurgy , organic chemistry
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