Open AccessA Micromachined Pb(Mg1/3Nb2/3)O3-PbTiO3 Single Crystal Composite Circular Array for Intravascular Ultrasound Imaging
Author(s) -
Sibo Li,
Jian Tian,
Xiaoning Jiang
Publication year - 2019
Publication title -
journal of engineering and science in medical diagnostics and therapy
Language(s) - English
Resource type - Journals
eISSN - 2572-7966
pISSN - 2572-7958
DOI - 10.1115/1.4041443
Subject(s) - materials science , center frequency , deep reactive ion etching , optics , fabrication , composite number , imaging phantom , insertion loss , transducer , ultrasound , intravascular ultrasound , optoelectronics , etching (microfabrication) , acoustics , reactive ion etching , composite material , band pass filter , medicine , physics , alternative medicine , layer (electronics) , pathology , cardiology
This paper describes the design, fabrication, and characterization of a micromachined high-frequency Pb(Mg 1/3 Nb 2/3 )O 3 -PbTiO 3 (PMN-PT) single crystal/epoxy 1-3 composite ultrasound circular array. The 1-3 composites were fabricated by deep reactive ion etching (DRIE) of PMN-PT single crystal. The feature size of single crystal pillars was 18 μm in diameter. The kerf between pillars was less than 4 μm. A 50-element circular array transducer (radially outward) with the pitch of 100 μm was wrapped around a needle resulting in an outer diameter of 1.7 mm. The array test showed that the center frequency reached 39±2 MHz and -6-dB fractional bandwidth was 82±6%. The insertion loss was -41 dB, and crosstalk between adjacent elements was -24 dB. A radial outward imaging testing with phantom wires (D = 50 μm) was conducted. The image was in a dynamic range of 30 dB to show a penetration depth of 6 mm by using the synthetic aperture method. The -6-dB beam width was estimated to be 60 μm in the axial direction at 3.1 mm distance away from the probe. The results suggest that the 40 MHz micromachined 1-3 composite circular array is promising for intravascular ultrasound (IVUS) imaging applications.