Open AccessVibration and Deflection of a Silicon-Wafer Slicer Cutting the Crystal Ingot
Author(s) -
Seiji CHONAN,
Zhongwei Jiang,
Yoshihiro Yuki
Publication year - 1993
Publication title -
journal of vibration and acoustics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 82
eISSN - 1528-8927
pISSN - 1048-9002
DOI - 10.1115/1.2930382
Subject(s) - ingot , deflection (physics) , vibration , slicing , materials science , structural engineering , boundary value problem , silicon , wafer , mechanics , composite material , engineering , mechanical engineering , physics , metallurgy , classical mechanics , acoustics , alloy , quantum mechanics , nanotechnology
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