Open AccessEVALUATION ON THE EGFET PH SENSING PERFORMANCE OF SOL-GEL SPIN COATED TITANIUM DIOXIDE THIN FILM
Author(s) -
Muhammad AlHadi Zulkefle,
Sukreen Hana Herman,
Rashidah Abdul Rahman,
Khairul Aimi Yusof,
Aimi Bazilah Rosli,
Wan Fazlida Hanim Abdullah,
Zurita Zulkifli
Publication year - 2021
Publication title -
jurnal teknologi/jurnal teknologi
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.191
H-Index - 22
eISSN - 2180-3722
pISSN - 0127-9696
DOI - 10.11113/jurnalteknologi.v83.16313
Subject(s) - sol gel , spin coating , materials science , thin film , titanium dioxide , analytical chemistry (journal) , hysteresis , surface roughness , nanotechnology , chemistry , chromatography , composite material , physics , quantum mechanics
For this study, TiO2 thin film was fabricated using the sol-gel spin coating method. The fabricated film was then applied as a sensing membrane in an extended gate field effect transistor (EGFET) pH sensor system. The pH sensing performance of the sol-gel spin-coated TiO2 was evaluated in terms of sensitivity, linearity, and hysteresis where the value obtained was 58.70 mV/pH, 0.9922, and 86.17 mV respectively. The drift rate of the sample when being measured for 12 consecutive hours was also determined where measurement in pH 4, pH 7, and pH 10 yield drift rate of 1.72 mV/h, 4.14 mV/h, and 6.05 mV/h respectively. Besides that, the TiO2 was characterized for its thickness (24.32 nm) and surface roughness (5.129 nm). From the results obtained, it was found that sol-gel spin-coated TiO2 thin film with thickness between 20 - 29 nm will have high pH sensitivity (more than 50 mV/pH).