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How to optimize the design of a quantitative HREM experiment so as to attain the highest precision
Author(s) -
DEN DEKKER A.,
SIJBERS J.,
VAN DYCK D.
Publication year - 1999
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/jmi.1999.194.1.95
Subject(s) - expression (computer science) , position (finance) , resolution (logic) , transmission electron microscopy , accuracy and precision , electron microscope , function (biology) , object (grammar) , algorithm , transmission (telecommunications) , atom (system on chip) , computer science , optics , biological system , materials science , physics , artificial intelligence , biology , embedded system , quantum mechanics , microbiology and biotechnology , telecommunications , finance , economics , programming language
Summary Using parameter estimation theory, an expression is derived for the maximum precision with which the position of a single atom can be estimated from high resolution transmission electron microscopy images. This expression, being a complicated function of the object as well as of the microscope parameters and the electron dose, can be used to optimize the design of an HREM experiment so as to attain the highest precision.