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Rapid aberration measurement with pixelated detectors
Author(s) -
LUPINI A.R.,
CHI M.,
JESSE S.
Publication year - 2016
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/jmi.12372
Subject(s) - optics , detector , lens (geology) , spherical aberration , measure (data warehouse) , contrast transfer function , computer science , physics , microscopy , optical aberration , wavefront , database
Summary Aberration‐corrected microscopy in a scanning transmission electron microscope requires the fast and accurate measurement of lens aberrations to align or ‘tune’ the corrector. Here, we demonstrate a method to measure aberrations based on acquiring a 4D data set on a pixelated detector. Our method is compared to existing procedures and the choice of experimental parameters is examined. The accuracy is similar to existing methods, but in principle this procedure can be performed in a few seconds and extended to arbitrary order. This method allows rapid measurement of aberrations and represents a step towards more automated electron microscopy.