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Aberration‐corrected STEM for atomic‐resolution imaging and analysis
Author(s) -
KRIVANEK O.L.,
LOVEJOY T.C.,
DELLBY N.
Publication year - 2015
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/jmi.12254
Subject(s) - scanning transmission electron microscopy , resolution (logic) , optics , spherical aberration , electron energy loss spectroscopy , electron , high resolution transmission electron microscopy , atom (system on chip) , electron microscope , electron tomography , spectroscopy , energy filtered transmission electron microscopy , atomic physics , transmission electron microscopy , materials science , physics , quantum mechanics , artificial intelligence , computer science , embedded system , lens (geology)
Summary Aberration‐corrected scanning transmission electron microscopes are able to form electron beams smaller than 100 pm, which is about half the size of an average atom. Probing materials with such beams leads to atomic‐resolution images, electron energy loss and energy‐dispersive X‐ray spectra obtained from single atomic columns and even single atoms, and atomic‐resolution elemental maps. We review briefly how such electron beams came about, and show examples of applications. We also summarize recent developments that are propelling aberration‐corrected scanning transmission electron microscopes in new directions, such as complete control of geometric aberration up to fifth order, and ultra‐high‐energy resolution EELS that is allowing vibrational spectroscopy to be carried out in the electron microscope.