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High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope
Author(s) -
EBERLE A.L.,
MIKULA S.,
SCHALEK R.,
LICHTMAN J.,
TATE M.L. KNOTHE,
ZEIDLER D.
Publication year - 2015
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/jmi.12224
Subject(s) - electron , secondary electrons , scanning electron microscope , optics , electron microscope , detector , resolution (logic) , wafer , materials science , electron tomography , semiconductor , image resolution , cathode ray , conventional transmission electron microscope , scanning confocal electron microscopy , microscope , physics , optoelectronics , scanning transmission electron microscopy , computer science , quantum mechanics , artificial intelligence
Summary Electron–electron interactions and detector bandwidth limit the maximal imaging speed of single‐beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.