High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope | Zendy

EBERLE A.L. | Zendy; MIKULA S. | Zendy; SCHALEK R. | Zendy; LICHTMAN J. | Zendy; TATE M.L. KNOTHE | Zendy; ZEIDLER D. | Zendy

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High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope

Author(s) -

EBERLE A.L.,

MIKULA S.,

SCHALEK R.,

LICHTMAN J.,

TATE M.L. KNOTHE,

ZEIDLER D.

Publication year - 2015

Publication title -

journal of microscopy

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.569

H-Index - 111

eISSN - 1365-2818

pISSN - 0022-2720

DOI - 10.1111/jmi.12224

Subject(s) - electron , secondary electrons , scanning electron microscope , optics , electron microscope , detector , resolution (logic) , wafer , materials science , electron tomography , semiconductor , image resolution , cathode ray , conventional transmission electron microscope , scanning confocal electron microscopy , microscope , physics , optoelectronics , scanning transmission electron microscopy , computer science , quantum mechanics , artificial intelligence

Summary Electron–electron interactions and detector bandwidth limit the maximal imaging speed of single‐beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.

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