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Nanometres‐resolution Kikuchi patterns from materials science specimens with transmission electron forward scatter diffraction in the scanning electron microscope
Author(s) -
BRODUSCH N.,
DEMERS H.,
GAUVIN R.
Publication year - 2013
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/jmi.12007
Subject(s) - electron , scanning electron microscope , optics , transmission electron microscopy , scanning transmission electron microscopy , resolution (logic) , conventional transmission electron microscope , electron microscope , electron diffraction , diffraction , reflection high energy electron diffraction , materials science , environmental scanning electron microscope , energy filtered transmission electron microscopy , high resolution transmission electron microscopy , physics , computer science , artificial intelligence , quantum mechanics
Summary A charge‐coupled device camera of an electron backscattered diffraction system in a scanning electron microscope was positioned below a thin specimen and transmission Kikuchi patterns were collected. Contrary to electron backscattered diffraction, transmission electron forward scatter diffraction provides phase identification and orientation mapping at the nanoscale. The minimum Pd particle size for which a Kikuchi diffraction pattern was detected and indexed reliably was 5.6 nm. An orientation mapping resolution of 5 nm was measured at 30 kV. The resolution obtained with transmission electron forward scatter diffraction was of the same order of magnitude than that reported in electron nanodiffraction in the transmission electron microscope. An energy dispersive spectrometer X‐ray map and a transmission electron forward scatter diffraction orientation map were acquired simultaneously. The high‐resolution chemical, phase and orientation maps provided at once information on the chemical form, orientation and coherency of precipitates in an aluminium–lithium 2099 alloy.