Plenary Lecture

Profile measurement of high precision mirror surfaces is carried out using multi sensor method with 2 or 3 distance sensors and an angle sensor. The uncertainty estimation is key technology to design and evaluate the multi sensor measurement system. In this article, the least squares calculation is applied on the multi sensor method and the error propagation of the least squares calculation is theoretically analyzed. The calculation procedure of the uncertainty estimation of the multi sensor method is theoretically defined. Then, we apply the uncertainty estimation procedure for two applications such as a multi cantilever AFM and a two dimensional linear motor stage. Using the multi cantilever AFM system, profile of resist surface is measured in wide area with nanometer accuracy. The experimental results and the uncertainty analysis of profile measurements are demonstrated for the multi cantilever AFM system. The two dimensional linear motor stage consists of a Sawyer type motor, two bar mirrors and three laser interferometers to control the position of the stage. The profiles of the bar mirrors are measured and the uncertainty of the profile measurement is estimated for high accurate position control of the stage.