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Effects of nano‐grain structures and surface defects on fracture of micro‐scaled polysilicon components
Author(s) -
Xu Ran,
Hu Xiaozhi
Publication year - 2020
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.17032
Subject(s) - materials science , composite material , fracture (geology) , grain size , nano , homogeneous , bridging (networking) , statistical physics , computer science , computer network , physics
This study examines a simple fracture model for microscopically heterogeneous polysilicon components when Griffith theory applicable only to homogeneous materials fails. The strength‐limiting micro/nano‐ surface defect a 0 is linked to the nano‐scaled grain size G of polysilicon and bulk fracture properties. Here the a 0 / G ratio is not large enough for polysilicon to be considered as homogeneous. Two polysilicon materials, with laminated grain structures ( G = 125 nm) and columnar grain structures ( G = 285 nm), have been analyzed. The simple fracture model together with a normal distribution methodology can be used to predict both the mean and 96% reliability fracture curves for the micro/nano‐crack range bridging the classic Griffith theory and the non‐linear fracture model.