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Heteroepitaxial growth of thick 3C‐SiC (110) films by Laser CVD
Author(s) -
Sun Qingyun,
Yang Meijun,
Li Jun,
Xu Qingfang,
Tu Rong,
Li Qizhong,
Zhang Song,
Zhang Lianmeng,
Goto Takashi,
Ohmori Hitoshi,
Kosinova Marina
Publication year - 2019
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.16297
Subject(s) - epitaxy , high resolution transmission electron microscopy , nucleation , materials science , chemical vapor deposition , transmission electron microscopy , substrate (aquarium) , pulsed laser deposition , thin film , surface finish , nanotechnology , optoelectronics , layer (electronics) , chemistry , composite material , oceanography , organic chemistry , geology