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Amorphous Ge‐Sb‐Se thin films fabricated by co‐sputtering: Properties and photosensitivity
Author(s) -
Halenkovič Tomáš,
Gutwirth Jan,
Němec Petr,
Baudet Emeline,
Specht Marion,
Gueguen Yann,
Sangleboeuf JeanChristophe,
Nazabal Virginie
Publication year - 2018
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.15453
Subject(s) - materials science , band gap , thin film , amorphous solid , refractive index , sputter deposition , analytical chemistry (journal) , sputtering , raman spectroscopy , ellipsometry , scanning electron microscope , spectroscopy , photobleaching , optics , optoelectronics , chemistry , nanotechnology , crystallography , physics , chromatography , quantum mechanics , composite material , fluorescence
Amorphous Ge–Sb–Se thin films were fabricated by a rf‐magnetron co‐sputtering technique employing the following cathodes: GeSe 2 , Sb 2 Se 3 , and Ge 28 Sb 12 Se 60 . The influence of the composition, determined by energy‐dispersive X‐ray spectroscopy, on the optical properties was studied. Optical properties were analyzed based on variable angle spectroscopic ellipsometry and UV ‐Vis‐ NIR spectrophotometry. The results show that the optical bandgap range 1.35‐2.08 eV with corresponding refractive index ranging from 3.33 to 2.36 can be reliably covered. Furthermore, morphological and topographical properties of selenide‐sputtered films studied by scanning electron microscopy and atomic force microscopy showed a good quality of fabricated films. In addition, structure of the films was controlled using Raman scattering spectroscopy. Finally, irreversible photoinduced changes by means of change in optical bandgap energy and refractive index of co‐sputtered films were studied revealing the photobleaching effect in Ge‐rich films when irradiated by near‐bandgap light under Ar atmosphere. The photobleaching effect tends to decrease with increasing antimony content.