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Control of ferroelectric and linear piezoelectric response of PZT films through texture
Author(s) -
Das Debashish,
Sanchez Luz,
Martin Joel,
Power Brian,
Isaacson Steven,
Polcawich Ronald G.,
Chasiotis Ioannis
Publication year - 2018
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.15419
Subject(s) - materials science , texture (cosmology) , ferroelectricity , piezoelectricity , dielectric , coercivity , figure of merit , piezoelectric coefficient , composite material , surface finish , electric field , condensed matter physics , optoelectronics , physics , quantum mechanics , artificial intelligence , computer science , image (mathematics)
The high and low field ferroelectric response of freestanding PbZr 0.52 Ti 0.48 O 3 ( PZT ) films, with texture varying from 100% (001) to 100% (111) was investigated via 500 nm thick PZT unimorphs deposited on the same substrate. It is shown that the ferroelectric and piezoelectric properties depend strongly on texture, and the effective transverse strain and stress coefficients vary linearly with %(001) and %(111) texture factors. PZT films with 100% (001) orientation displayed 150%, 140%, and 80% larger linear piezoelectric strain coefficient, saturated strain coefficient, and saturated stress coefficient, respectively, compared to films with 100% (111) orientation. As a result, pure (001) textured PZT films with 20% higher dielectric constant have 50% higher figure of merit in sensing than films with pure (111) texture. The piezoelectric and ferroelectric properties of all but one combinations of (001) and (111) texture were shown for the first time to be bounded by the values for 100% (001) and 100% (111) texture. A notable exception was PZT films comprised of 73% (001) and 27% (111) texture which showed stable piezoelectric coefficients at all electric fields, with major technological implication to low power microdevices. Finally, the coercive field was shown to decrease with (001) texture factor and excess‐Pb in the PZT and the PbTiO 3 seed layer.