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Crack‐Free Drying of Ceramic Microparts on a Hydrophobic Flexible Polymer Substrate Using Soft Lithography
Author(s) -
Su Bo,
Meng Junhu,
Zhang Zhaozhu
Publication year - 2016
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.14173
Subject(s) - ceramic , materials science , soft lithography , substrate (aquarium) , fabrication , composite material , lithography , polymer , adhesive , nanotechnology , layer (electronics) , optoelectronics , medicine , oceanography , alternative medicine , pathology , geology
Drying is a critical step in the fabrication of ceramic microparts from suspensions using soft lithography. In this communication, a simple method using a hydrophobic flexible polymer substrate was demonstrated to avoid the formation of cracks within ceramic microparts. Crack‐free alumina green microchannel parts with 120 μm feature size were attained on a polyethylene film. The results show that both the hydrophobic and flexible properties of the polymeric substrates can remove the substrate constraint to the green body of micropart, which is capable of preventing cracks formation. The method can be used to fabricate ceramic microparts/micropatterns for microeletromechanical systems and functional thick ceramic films.