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Deformation and Fracture of β‐Silicon Nitride Micropillars
Author(s) -
Csanádi Tamás,
Chinh Nguyen Q.,
Szommer Péter,
Dusza Ján,
Lenčés Zoltán,
Šajgalík Pavol
Publication year - 2015
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.13402
Subject(s) - nanoindentation , materials science , electron backscatter diffraction , silicon nitride , focused ion beam , composite material , scanning electron microscope , slip (aerodynamics) , deformation (meteorology) , fracture (geology) , silicon , metallurgy , ion , microstructure , physics , quantum mechanics , thermodynamics
Room‐temperature deformation and fracture behaviors under microcompression of single crystal β‐silicon nitride (Si 3 N 4 ) micropillars were investigated. Pillars were fabricated by focused ion beam ( FIB ) in large Si 3 N 4 grains, located close to the basal and prismatic orientations, selected by electron backscatter diffraction ( EBSD ). The micromechanical test and the damage characterization were performed by nanoindentation and scanning electron microscopy ( SEM ), respectively. The elastic, plastic, and fracture properties, such as Young's modulus, yield stress, and rupture stress are considerably influenced by the pillar orientation. The activation of the { 10 1 ¯ 0 } [ 0001 ] type slip system was identified in case of basal oriented micropillars.