Deformation and Fracture of β‐Silicon Nitride Micropillars

Room‐temperature deformation and fracture behaviors under microcompression of single crystal β‐silicon nitride (Si 3 N 4 ) micropillars were investigated. Pillars were fabricated by focused ion beam ( FIB ) in large Si 3 N 4 grains, located close to the basal and prismatic orientations, selected by electron backscatter diffraction ( EBSD ). The micromechanical test and the damage characterization were performed by nanoindentation and scanning electron microscopy ( SEM ), respectively. The elastic, plastic, and fracture properties, such as Young's modulus, yield stress, and rupture stress are considerably influenced by the pillar orientation. The activation of the { 10 1 ¯ 0 } [ 0001 ] type slip system was identified in case of basal oriented micropillars.