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Phase and Texture Evolution in Chemically Derived PZT Thin Films on Pt Substrates
Author(s) -
Mhin Sungwook,
Nittala Krishna,
Lee Jinhyung,
Robinson Douglas S.,
Ihlefeld Jon F.,
Brennecka Geoff L.,
Sanchez Luz M.,
Polcawich Ronald G.,
Jones Jacob L.
Publication year - 2014
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.13007
Subject(s) - materials science , texture (cosmology) , lead zirconate titanate , substrate (aquarium) , thin film , crystallization , layer (electronics) , pyrochlore , phase (matter) , coating , platinum , chemical engineering , composite material , analytical chemistry (journal) , ferroelectricity , nanotechnology , chemistry , chromatography , dielectric , catalysis , artificial intelligence , image (mathematics) , oceanography , computer science , engineering , biochemistry , optoelectronics , organic chemistry , geology
The crystallization of lead zirconate titanate ( PZT ) thin films was evaluated on two different platinum‐coated Si substrates. One substrate consisted of a Pt coating on a Ti adhesion layer, whereas the other consisted of a Pt coating on a TiO 2 adhesion layer. The Pt deposited on TiO 2 exhibited a higher degree of preferred orientation than the Pt deposited on Ti (as measured by the Full Width at Half Maximum of the 111 peak about the sample normal). PZT thin films with a nominal Zr/Ti ratio of 52/48 were deposited on the substrates using the inverted mixing order ( IMO ) route. Phase and texture evolution of the thin films were monitored during crystallization using in situ X‐ray diffraction at a synchrotron source. The intensity of the Pt 3 Pb phase indicated that deposition on a highly oriented Pt/TiO 2 substrate resulted in less diffusion of Pb into the substrate relative to films deposited on Pt/Ti. There was also no evidence of the pyrochlore phase influencing texture evolution. The results suggest that PZT nucleates directly on Pt, which explains the observation of a more highly oriented 111 texture of PZT on the Pt/TiO 2 substrate than on the Pt/Ti substrate.