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Structural Evolution of B–C Thin Films Deposited from SPS ed‐Target and Dual‐Target
Author(s) -
Li Qizhong,
Zhang Song,
Wang Chuanbin,
Shen Qiang,
Lu Wenzhong,
Zhang Lianmeng
Publication year - 2014
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.12910
Subject(s) - boron carbide , x ray photoelectron spectroscopy , thin film , materials science , pulsed laser deposition , deposition (geology) , carbide , analytical chemistry (journal) , chemical engineering , nanotechnology , composite material , chemistry , organic chemistry , sediment , engineering , biology , paleontology
Boron carbide thin films have been synthesized via pulsed laser deposition process using Spark Plasma Sintered ( SPS ed) and dual‐targets, respectively. Two kinds of structural evolutions have been found by investigation of bonding environments in as‐deposited thin films via X‐ray photoelectron spectroscopy study. With decreasing of B/C ratio, films deposited from SPS ed‐target show the transformation of B 11 C ‐ CBB → B 11 C ‐ CBC . In contrast, the films deposited from dual‐target present the B 11 C ‐ CBB → B 10 C 2 ‐ CBB structural change.