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Crystallization Atmosphere and Substrate Effects on the Phase and Texture of Chemical Solution Deposited Strontium Niobate Thin Films
Author(s) -
Campion Michael J.,
BrownShaklee Harlan J.,
Rodriguez Mark A.,
Richardson Jacob J.,
Clem Paul G.,
Ihlefeld Jon F.
Publication year - 2013
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.12193
Subject(s) - crystallite , materials science , partial pressure , thin film , crystallization , annealing (glass) , sapphire , oxygen , analytical chemistry (journal) , mineralogy , strontium titanate , texture (cosmology) , perovskite (structure) , crystallography , chemical engineering , chemistry , nanotechnology , composite material , optics , metallurgy , laser , physics , image (mathematics) , organic chemistry , chromatography , artificial intelligence , computer science , engineering
Strontium niobate (Sr:Nb = 1:1) thin films were prepared via chemical solution deposition on (001)‐oriented SrTiO 3 , (001) p ‐oriented LaAlO 3 , (0001)‐oriented sapphire, and polycrystalline alumina substrates. Crystallization in oxygen at 1000°C yielded Sr 2 Nb 2 O 7 films on all substrates with strong (010) orientation. Films on LaAlO 3 and SrTiO 3 single‐crystal substrates possessed a small amount of preferred in‐plane orientation, whereas films prepared on sapphire and polycrystalline alumina substrates were fiber textured. Films crystallized at 900°C in a low oxygen atmosphere (~10 − 21 atm p O 2 ) formed a randomly oriented polycrystalline perovskite, SrNbO 3−δ on all substrates. A similar set of films crystallized at 900°C at a slightly higher oxygen partial pressure (~10 −15 atm p O 2 ) was comprised of Sr 2 Nb 2 O 7 and SrNbO 3−δ phases, exposing the dependence of phase formation on oxygen partial pressure. When subjected to a high‐temperature anneal in oxygen, the SrNbO 3−δ phase is shown to transform into Sr 2 Nb 2 O 7 , however, Sr 2 Nb 2 O 7 did not significantly reverse transform into SrNbO 3−δ after annealing in low oxygen partial pressure atmospheres.