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Oxidation Transitions for SiC Part II. Passive‐to‐Active Transitions
Author(s) -
Harder Bryan,
Jacobson Nathan,
Myers Dwight
Publication year - 2013
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.12104
Subject(s) - suboxide , active site , substrate (aquarium) , active oxygen , stoichiometry , oxide , materials science , oxygen , chemical engineering , active layer , chemistry , nanotechnology , catalysis , layer (electronics) , metallurgy , organic chemistry , oceanography , thin film transistor , engineering , geology
Oxidation of SiC can occur in a passive mode, where a protective film is generated, or in an active mode, where a volatile suboxide is generated. The transitions from active‐to‐passive and passive‐to‐active are particularly important to understand as they occur via different mechanisms. In Part II of this article, the passive‐to‐active transition is explored. Three different types of SiC are examined— Si ‐rich SiC , stoichiometric SiC , and C ‐rich SiC . In addition to an in situ transition from passive‐to‐active, the effect of a preformed film on all three types of SiC is explored. It appears that the passive‐to‐active transition occurs when the SiO 2 scale begins to react with the SiC substrate. This reaction generates SiO (g) and CO (g), which build pressure beneath the SiO 2 scale, eventually causing the oxide to rupture. In addition, the SiO (g) can oxidize a distance away from the surface leading to the formation of SiO 2 needles and further promoting this SiO 2 / SiC reaction. Thermodynamic and kinetic data are used to predict transition pressures of oxygen, which show reasonable agreement with those measured.