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Influence of LNO Top Electrodes on Electrical Properties of KNN / LNO Thin Films Prepared by RF Magnetron Sputtering
Author(s) -
Li Tao,
Wang Genshui,
Li Kui,
Sama Nossikpendou,
Remiens Denis,
Dong Xianlin
Publication year - 2013
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/jace.12047
Subject(s) - materials science , lanio , sputter deposition , piezoelectricity , ferroelectricity , thin film , polarization (electrochemistry) , dielectric , analytical chemistry (journal) , electrode , sputtering , optoelectronics , composite material , nanotechnology , chemistry , chromatography
Highly (001) oriented ( K , Na ) NbO 3 ( KNN ) lead‐free piezoelectric thin films were grown on LaNiO 3 ( LNO )‐coated silicon by RF magnetron sputtering. The effects of the top electrodes on the electrical properties of KNN thin films were investigated. The dielectric and piezoelectric properties were remarkably improved in LNO / KNN / LNO (ε r = 899 at 1 kHz, d 33 = 58 pm/V), compared with that in Pt / KNN / LNO (ε r = 584 at 1 kHz, d 33 = 26 pm/V). An enhanced ferroelectricity was also obtained in LNO / KNN / LNO , with a remnant polarization of 12 μC/cm 2 and a maximum polarization of 23 μC/cm 2 at the applied field of 200 kV/cm. Besides, the temperature dependence of piezoelectricity of the films was characterized in this study.