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FUNDAMENTAL CONSIDERATIONS IN THE DEPOSITION OF BARIUM FERRITE FILMS IN AN INDUCTIVELY COUPLED PLASMA REACTOR
Author(s) -
VIDAL EDGAR E.,
TAYLOR PATRICK R.
Publication year - 1999
Publication title -
annals of the new york academy of sciences
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.712
H-Index - 248
eISSN - 1749-6632
pISSN - 0077-8923
DOI - 10.1111/j.1749-6632.1999.tb08762.x
Subject(s) - inductively coupled plasma , barium ferrite , argon , materials science , amorphous solid , plasma torch , barium , analytical chemistry (journal) , plasma , deposition (geology) , ferrite (magnet) , chemical engineering , chemistry , metallurgy , composite material , chromatography , paleontology , physics , organic chemistry , quantum mechanics , sediment , engineering , biology
The production of barium ferrite films has been studied using an Inductively Coupled Plasma (ICP) Reactor. Solutions containing dissolved salts of iron and barium in water were used as precursors. The solution was atomized in the hot region of the plasma and the resulting vapors and carrier gases impinged on a substrate holder. Vycor glass #7913 was used as the substrate material due to its properties and low cost. Pure argon and combinations of argon and oxygen were used as plasma gases. Power of the plasma torch was varied as well as the rotational speed, the distance of the substrate from the plasma torch exit and the molar ratio of iron to barium in the feed solution. Deposited films were characterized using Scanning and Transmission Electron Microscopy, Vibrating Sample Magnetometery and X‐Ray Diffraction. Example results are given that show that it is possible to grow films of barium hexaferrite on Vycor glass. Films that were amorphous after deposition were heat treated in an oxygen atmosphere to crystallize the barium hexaferrite. A mathematical model that describes the momentum, heat and mass transfer in the reactor was developed. It was expected that using a near atmospheric pressure ICP would demonstrate technological and economical advantages over existing methods.