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DEPOSITION CONDITIONS RELATED TO THE CHEMICAL AND OPTICAL PROPERTIES OF HYDROGENATED AMORPHOUS SILICON THIN FILMS
Author(s) -
Perrin J.,
Drevillon B.,
Toulemonde M.
Publication year - 1983
Publication title -
annals of the new york academy of sciences
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.712
H-Index - 248
eISSN - 1749-6632
pISSN - 0077-8923
DOI - 10.1111/j.1749-6632.1983.tb23301.x
Subject(s) - physics , amorphous silicon , silicon , amorphous solid , engineering physics , humanities , nuclear physics , library science , art , crystalline silicon , optoelectronics , crystallography , chemistry , computer science