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HOLOGRAPHIC MICROSCOPY AND INTEGRATED CIRCUIT INSPECTION *
Author(s) -
Ligten Raoul F.,
Lawton Kenneth C.
Publication year - 1969
Publication title -
annals of the new york academy of sciences
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.712
H-Index - 248
eISSN - 1749-6632
pISSN - 0077-8923
DOI - 10.1111/j.1749-6632.1969.tb43138.x
Subject(s) - corporation , library science , history , computer science , law , political science