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SPUTTERING BY ION BOMBARDMENT
Author(s) -
Wehner G. K.
Publication year - 1963
Publication title -
annals of the new york academy of sciences
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.712
H-Index - 248
eISSN - 1749-6632
pISSN - 0077-8923
DOI - 10.1111/j.1749-6632.1963.tb54935.x
Subject(s) - citation , sputtering , library science , computer science , nanotechnology , materials science , thin film