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Effect of the Silicon Nitride Coating of Quartz Crucible on Impurity Distribution in Ingot‐Cast Multicrystalline Silicon
Author(s) -
Li Jiayan,
Liu Mei,
Tan Yi,
Wen Lishi
Publication year - 2012
Publication title -
international journal of applied ceramic technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.4
H-Index - 57
eISSN - 1744-7402
pISSN - 1546-542X
DOI - 10.1111/j.1744-7402.2012.02832.x
Subject(s) - ingot , materials science , crucible (geodemography) , impurity , silicon , silicon nitride , metallurgy , quartz , nucleation , layer (electronics) , nitride , coating , grain boundary , composite material , microstructure , alloy , chemistry , computational chemistry , organic chemistry
Multicrystalline silicon ingots were fabricated via the directional solidification method in a vacuum induction furnace using silicon nitride ( Si 3 N 4 ) as quartz crucible coating. The effect of Si 3 N 4 coating on the impurity content, transference, and distribution in Si ingots was investigated. The results can be summarized as follows: The impurities contained in Si ingots, including Fe , Ca , Mn , Cu , P , and B , were found to decrease at varying degrees when the inner surface of the quartz crucible was coated with Si 3 N 4 . A mixed layer composted by Si 3 N 4 and Si was observed on the surface of the Si ingot. This mixed layer provided microdefects for the nucleation of metallic impurities. The Fe and N contents in the Si / Si 3 N 4 mixed layer changed with the same tendency, and Fe Si 2 particles formed on the Si / Si 3 N 4 crystalline boundary. Both Fe and Ca precipitated in the SiC particles near the Si ingot/ Si 3 N 4 ‐coating interface.