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Deposition Rate, Texture, and Mechanical Properties of SiC Coatings Produced by Chemical Vapor Deposition at Different Temperatures
Author(s) -
Long Ying,
Javed Athar,
Chen Zhaoke,
Xiong Xiang,
Xiao Ping
Publication year - 2012
Publication title -
international journal of applied ceramic technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.4
H-Index - 57
eISSN - 1744-7402
pISSN - 1546-542X
DOI - 10.1111/j.1744-7402.2012.02786.x
Subject(s) - materials science , microstructure , coating , chemical vapor deposition , crystallinity , texture (cosmology) , composite material , deposition (geology) , grain size , silicon carbide , nanotechnology , paleontology , image (mathematics) , artificial intelligence , sediment , computer science , biology
Silicon carbide ( SiC ) coatings were produced on carbon/carbon ( C / C ) composites substrates using chemical vapor deposition ( CVD ) at different temperatures (1100°C, 1200°C, and 1300°C). The deposition rate was found to increase with deposition temperature from 1100°C to 1200°C. From 1200°C to 1300°C, the deposition rate decreased. SiC coating produced at 1200°C exhibited a strong (111) texture compared with the coatings produced at other temperatures. Both hardness and Young's modulus were also found to be higher in the coating produced at 1200°C. The variation in mechanical properties with the increase in temperature from 1100°C to 1300°C showed a direct correlation with the change in deposition rate and (111) texture. Microstructure analysis shows that the change in CVD temperature leads to the change in grain size, crystallinity, and density of stacking faults of SiC coatings, which appears to have no significant effect on mechanical properties of SiC compared with the texture observed in SiC coating. For the coating deposited at 1200°C, both the hardness and Young's modulus increased gradually from the substrate/coating interface to the top surface. The nonuniformity of mechanical properties along the cross‐section of the coating is attributed to the nonuniform microstructure.