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A ‐ and B ‐Site Modified Perovskite Nanosheets and Their Integrations into High‐ k Dielectric Thin Films
Author(s) -
Osada Minoru,
Sasaki Takayoshi
Publication year - 2011
Publication title -
international journal of applied ceramic technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.4
H-Index - 57
eISSN - 1744-7402
pISSN - 1546-542X
DOI - 10.1111/j.1744-7402.2011.00713.x
Subject(s) - materials science , nanosheet , perovskite (structure) , dielectric , ion , chemical engineering , thin film , dielectric permittivity , deposition (geology) , permittivity , nanotechnology , optoelectronics , organic chemistry , engineering , paleontology , sediment , biology , chemistry
We investigated dielectric properties of perovskite nanosheets with different compositions ( Ca 2 − x Sr x Nb 3 − y Ta y O 10 ) to study the influence of A ‐ and B ‐site modifications on dielectric properties. L angmuir– B lodgett deposition was employed to fabricate multilayer nanofilms of perovskite nanosheets. In these nanosheets, the A ‐site modification by Sr 2+ ions causes the increase in ε r value, whereas the B‐ site modification with Ta 5+ ions improves leakage current characteristics and reduces permittivity value. The optimized property (ε r = 240) is obtained for Sr 2 Nb 3 O 10 nanosheet. We also discuss high‐ κ properties of Ca 2 − x Sr x Nb 3− y Ta y O 10 nanosheets by detailed investigations on first‐principles calculations and interfacial structures.