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Microanalyses on the RuO 2 Particle–Glass Matrix Interface in Thick‐Film Resistors with Piezoresistive Effects
Author(s) -
Totokawa Masashi,
Yamashita Syuichi,
Morikawa Kenji,
Mitsuoka Yoshihito,
Tani Toshihiko,
Makino Hiroaki
Publication year - 2009
Publication title -
international journal of applied ceramic technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.4
H-Index - 57
eISSN - 1744-7402
pISSN - 1546-542X
DOI - 10.1111/j.1744-7402.2008.02325.x
Subject(s) - borosilicate glass , materials science , piezoresistive effect , composite material , porous glass , resistive touchscreen , bismuth , diffusion , layer (electronics) , metallurgy , porosity , physics , electrical engineering , thermodynamics , engineering
The piezoresistive mechanisms of composite thick films based on RuO 2 particles and both calcium‐borosilicate and bismuth‐borosilicate glass matrices were investigated by chemical and electrical microanalyses. The resistor based on bismuth‐borosilicate glass showed higher sensitivity than that based on calcium‐borosilicate glass. It was confirmed that the diffusion of ruthenium into glass affects the binding state of RuO 2 at the interface of the glass. Furthermore, an intermediate resistive layer is detected around the RuO 2 particle. These results suggest that the piezoresistive effect is related to a change in the electrical conductivity of the interfacial reaction layer caused by the diffusion of ruthenium into glass.