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Microfabrication of Three‐Dimensional Photonic Crystals of SiO 2 –Al 2 O 3 Ceramics and Their Terahertz Wave Properties
Author(s) -
Chen Weiwu,
Kirihara Soshu,
Miyamoto Yoshinari
Publication year - 2008
Publication title -
international journal of applied ceramic technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.4
H-Index - 57
eISSN - 1744-7402
pISSN - 1546-542X
DOI - 10.1111/j.1744-7402.2008.02231.x
Subject(s) - materials science , ceramic , sintering , photonic crystal , microfabrication , diamond , terahertz radiation , shrinkage , diamond cubic , lattice constant , optoelectronics , composite material , optics , fabrication , diffraction , medicine , alternative medicine , pathology , physics
Dense three‐dimensional microphotonic crystals of SiO 2 –Al 2 O 3 ceramics were fabricated using microstereolithography and successive sintering process. The forming dimensional tolerance for a 50 vol% ceramic paste is 10 μm and sintering shrinkage is around 12%. Diamond‐type photonic crystals with lattice constants of 500 and 125 μm were formed and sintered successfully. The band gaps of the samples were measured and compared with the theoretically calculated band diagram.