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Characterization of the Piezoelectric Properties of Pb 0.98 Ba 0.02 (Mg 1/3 Nb 2/3 )O 3 –PbTiO 3 Epitaxial Thin Films
Author(s) -
Maria JonPaul,
Shepard Joseph F.,
TrolierMcKinstry Susan,
Watkins T. R.,
Payzant A. E.
Publication year - 2005
Publication title -
international journal of applied ceramic technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.4
H-Index - 57
eISSN - 1744-7402
pISSN - 1546-542X
DOI - 10.1111/j.1744-7402.2005.02004.x
Subject(s) - materials science , piezoelectricity , poling , piezoelectric coefficient , polarization (electrochemistry) , analytical chemistry (journal) , thin film , diffraction , wafer , mineralogy , ferroelectricity , dielectric , nanotechnology , optics , optoelectronics , composite material , physics , chemistry , chromatography
Pb(Mg 1/3 Nb 2/3 )O 3 –PbTiO 3 (PMN–PT) (70/30) thin films were deposited by pulsed laser deposition using two growth strategies: adsorption controlled deposition from lead‐rich targets (∼25–30 mass%) and lower‐temperature deposition ( T d ≤600°C) from targets containing a small amount of excess lead oxide (≤3 mass %). The substrates used were (001) SrRuO 3 /LaAlO 3 . Typical remanent polarization values ranged between 12 and 14 μC/cm 2 for these films. The longitudinal piezoelectric coefficient ( d 33,f ) was measured using in situ four‐circle X‐ray diffraction, and the transverse coefficient ( d 31,f or e 31,f ) was measured using the wafer flexure method. d 33,f and e 31,f coefficients of ∼300–350 pm/V and ∼−11 C/m 2 were calculated, respectively. In general, the piezoelectric coefficients and aging rates were strongly asymmetric, suggesting the presence of a polarization bias. The large, extremely stable piezoelectric response that results from poling parallel to the preferred polarization direction is attractive for miniaturized sensors and actuators.