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Local Crystallization of Noncrystallized PbTiO 3 Thin Film by a Heated Atomic Force Microscope Tip
Author(s) -
Son Jong Yeog,
Jung Inhwa,
Lee Min Jea
Publication year - 2012
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2012.05167.x
Subject(s) - nanodot , thin film , materials science , crystallization , ferroelectricity , atomic force microscopy , substrate (aquarium) , spin coating , mineralogy , analytical chemistry (journal) , crystallography , nanotechnology , optoelectronics , chemical engineering , dielectric , chemistry , oceanography , chromatography , geology , engineering
We report locally crystallized ferroelectric nanodots in a noncrystallized PbTiO 3 thin film with a thickness of about 50 nm. A sol PbTiO 3 thin film was deposited on a Pt / TiO 2 / SiO 2 / Si substrate by a spin coating process. To form a noncrystallized PbTiO 3 thin film, the sol PbTiO 3 thin film was annealed at 450°C for 1 h. Locally crystallized nanodots were formed by the local crystallization process using an atomic force microscopy tip heated to 700°C. We adjusted the diverse diameters of locally crystallized PbTiO 3 nanodots in the range from 200 to 400 nm by controlling the local heating times.