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Dielectric Properties of Solution‐Deposited Crystalline Barium Titanate Thin Films
Author(s) -
Roy Biplab Kumar,
Cho Junghyun
Publication year - 2012
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2012.05104.x
Subject(s) - materials science , dielectric , barium titanate , ceramic , hydrothermal circulation , amorphous solid , microelectronics , thin film , capacitor , ceramic capacitor , corrosion , high κ dielectric , chemical engineering , permittivity , hydrothermal synthesis , mineralogy , nanotechnology , composite material , optoelectronics , crystallography , electrical engineering , chemistry , voltage , engineering
We have developed a “two‐step” solution‐based processing to deposit high‐ k ceramic thin films. Electrochemically pre‐coated amorphous titania layers were “hydrothermally” or “hydrothermal‐electrochemically” converted to crystalline BaTiO 3 films at ≤90°C. In hydrothermal process, an in situ electrochemical protection ( ECP ) mechanism enables utilization of common metallic substrates (e.g., Cu ), which otherwise suffer corrosion from the precursor. Microstructural evolution of BaTiO 3 films along with the effectiveness of ECP is discussed in this article. Derived BaTiO 3 shows a dielectric constant of ~80 at 100 kHz, which makes it a promising candidate for high‐density microelectronic capacitor applications.