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Determination of the True Y oung's Modulus of Pb ( Zr 0.52 Ti 0.48 ) O 3 Films by Nanoindentation: Effects of Film Orientation and Substrate
Author(s) -
Liu Dan,
Zhou Bo,
Yoon Sang H.,
Kim SeonBae,
Ahn Hosang,
Prorok Barton C.,
Kim SeungHyun,
Kim DongJoo
Publication year - 2011
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2011.04867.x
Subject(s) - nanoindentation , materials science , substrate (aquarium) , composite material , silicon nitride , layer (electronics) , silicon , indentation , modulus , silicon oxide , thin film , nitride , young's modulus , nanotechnology , optoelectronics , oceanography , geology
PZT films were deposited by the sol‐gel method on platinized silicon substrates with silicon nitride and silicon oxide structural layer materials. The crystalline orientations of the PZT films were controlled by both a chelating agent and pyrolysis temperature. A nanoindentation CSM (continuous stiffness measurement) technique was utilized to characterize the Y oung's moduli of these PZT films. It was found that the measured moduli of PZT films on the two types of substrates showed similar orientation dependence ( E 001 > E 111 > E (110,111) ) but distinct values, which indicated a clear substrate effect. By using a new model of film indentation, we were able to decouple the effects of film orientation and structural layer type on the Y oung's modulus.