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Reply to the “Comment on ‘Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors’ ”
Author(s) -
Nuffer Jürgen,
Riedel Ralf
Publication year - 2011
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2010.04075.x
Subject(s) - citation , library science , physics , humanities , art history , art , computer science
Jürgen Nuffer and Ralf Riedel reply to the comment by D. D. L. Chung on their original paper 'Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors'. The basic argument in the comment is that the experimental method of measuring the piezoresistive behavior of the SiOC specimen, as used in the study is flawed because the authors have applied a 2-point measurement system instead of a 4-point technique to determine the electrical resistivity of the samples. The authors confirm that the main reason why the 2-point method was used is that their specimens are rather small in size. The application of the 4-point method to these specimens would have needed a time-consuming experimental procedure. Chung has stated that the gauge factor k = 145, as reported in the original paper, should attain lower values. The authors believe that if they again assume an error of 1 in their measurement, then the gauge factor is reduced to about k = 130. This deviation is accepta ble and does not significantly change the scientific conclusions derived from their studies